1. Special Spray Skill

■ Stress release etching

■ The chemical atomization system can reduce the

    usage of chemical effectively

■ Good Uniformity and Etching Rate

 
2. Non-contact Transfer system

3. Double-side clean chamber

■ A water film on Chamber bottom

■ Top & bottom side process together

4. Recycle circular designed

■ Separate chemical and DIW

■ Recycle rate:  95% above