1.Diversification of removed technology     (Applicated  on PR Stripper and Metal lift-off…etc,)

■ To pre-softening for special photo-resistance in       

    advance

■ Several nozzle jet systems spray type of selection

■ Matching of different process chamber

2. Non-contact transfer system

 
3. Double-side clean chamber

■ A water film on Chamber bottom

■ Top & bottom side process together