1.Diversification of removed technology (Applicated  on PR Stripper and Metal lift-off…etc,)

■ High removal rate of special nozzle jet systems

    designed

■ The solvent atomization system can reduce the usage

    of solvent effectively and saving cost

■ To pre-softening for special photo-resistance in

    advance

2. Non-contact transfer system

3. Double-side clean chamber

■ A water film on Chamber bottom

■ Top & bottom side process together