Marangoni Dryer

1. High Performance

■ Dry in short time

■ Applied to standard and thinner wafer

■ Low broken rate in thinner wafer

2. Advantage

■ Watermarks free

■ Particle has filtered out

■ photoresist maintenance

■ reduce the usage of chemical and gas volume

3. Model Type

■ IPA Dryer

■ Hot N2 Dryer